A Micromachined 94 GHz Dielectric Resonator Antenna for Focal Plane Array Applications
Paper in proceedings, 2007

In this paper a new concept of integrating micromachined high-resistivity (HR) silicon dielectric resonator antennas (DRAs) compatible with a millimeter wave multichip module deposited (MCM-D) process based on multiple layers of BenzoCycloButhene (BCB) is presented. The HR Si wafer is used not only as a carrier substrate for the BCB but also for manufacturing of the integrated antenna elements. A 4×8 focal plane array (FPA) was designed for use in a 94 GHz imaging radar system. Each channel uses a small 2×2 DRA subarray as feed element. By using the presented antenna a higher impedance bandwidth and radiation efficiency can be attained compared to the use of microstrip antennas. An improved isolation between the antennas and the feed lines/active circuits is also realized. © 2007 IEEE.


Jan Svedin

Swedish Defence Research Agency (FOI)

L. -G. Huss

Swedish Defence Research Agency (FOI)

David Karlén

Chalmers, Microtechnology and Nanoscience (MC2)

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2)

Cristina Rusu

Imego AB - The Institute of Micro and Nanotechnology

IEEE MTT-S International Microwave Symposium Digest

0149645X (ISSN)

1375 - 1378 4264091

Areas of Advance

Information and Communication Technology

Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)



Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

Other Electrical Engineering, Electronic Engineering, Information Engineering


Nanofabrication Laboratory





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