A Micromachined 94 GHz Dielectric Resonator Antenna for Focal Plane Array Applications
Paper in proceedings, 2007
In this paper a new concept of integrating micromachined high-resistivity (HR) silicon dielectric resonator antennas (DRAs) compatible with a millimeter wave multichip module deposited (MCM-D) process based on multiple layers of BenzoCycloButhene (BCB) is presented. The HR Si wafer is used not only as a carrier substrate for the BCB but also for manufacturing of the integrated antenna elements. A 4×8 focal plane array (FPA) was designed for use in a 94 GHz imaging radar system. Each channel uses a small 2×2 DRA subarray as feed element. By using the presented antenna a higher impedance bandwidth and radiation efficiency can be attained compared to the use of microstrip antennas. An improved isolation between the antennas and the feed lines/active circuits is also realized. © 2007 IEEE.
Author
Jan Svedin
Swedish Defence Research Agency (FOI)
L. -G. Huss
Swedish Defence Research Agency (FOI)
David Karlén
Chalmers, Microtechnology and Nanoscience (MC2)
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2)
Cristina Rusu
Imego AB - The Institute of Micro and Nanotechnology
IEEE MTT-S International Microwave Symposium Digest
0149645X (ISSN)
1375 - 1378 4264091Areas of Advance
Information and Communication Technology
Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)
Transport
Production
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
Other Electrical Engineering, Electronic Engineering, Information Engineering
Infrastructure
Nanofabrication Laboratory
DOI
10.1109/MWSYM.2007.380469
ISBN
1424406889