A Micromachined 94 GHz Dielectric Resonator Antenna for Focal Plane Array Applications
Paper in proceeding, 2007
In this paper a new concept of integrating micromachined high-resistivity (HR) silicon dielectric resonator antennas (DRAs) compatible with a millimeter wave multichip module deposited (MCM-D) process based on multiple layers of BenzoCycloButhene (BCB) is presented. The HR Si wafer is used not only as a carrier substrate for the BCB but also for manufacturing of the integrated antenna elements. A 4×8 focal plane array (FPA) was designed for use in a 94 GHz imaging radar system. Each channel uses a small 2×2 DRA subarray as feed element. By using the presented antenna a higher impedance bandwidth and radiation efficiency can be attained compared to the use of microstrip antennas. An improved isolation between the antennas and the feed lines/active circuits is also realized. © 2007 IEEE.
Author
Jan Svedin
Swedish Defence Research Agency (FOI)
L. -G. Huss
Swedish Defence Research Agency (FOI)
David Karlén
Chalmers, Microtechnology and Nanoscience (MC2)
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2)
Cristina Rusu
Imego AB - The Institute of Micro and Nanotechnology
IEEE MTT-S International Microwave Symposium Digest
0149645X (ISSN)
1375 - 1378 42640911424406889 (ISBN)
Areas of Advance
Information and Communication Technology
Nanoscience and Nanotechnology
Transport
Production
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
Other Electrical Engineering, Electronic Engineering, Information Engineering
Infrastructure
Nanofabrication Laboratory
DOI
10.1109/MWSYM.2007.380469
ISBN
1424406889