David Karlén

Showing 19 publications

2009

Boron impurity at the Si/SiO2 interface in SOI wafers and consequences for piezoresistive MEMS devices

Alexandra Nafari, David Karlén, Cristina Rusu et al
Journal of Micromechanics and Microengineering. Vol. 19 (1), p. 6-
Journal article
2008

Boron at Si/SiO2 interface in SOI wafers and consequences for piezoresistive MEMS devices

Alexandra Nafari, David Karlén, Cristina Rusu et al
MicroMechanics Europe 2008
Paper in proceedings
2008

MEMS-based VCSEL beam steering using replicated polymer diffractive lens

Karin Hedsten, Jonas Melin, Jörgen Bengtsson et al
Sensors and Actuators, A: Physical. Vol. 142 (1), p. 336-345
Journal article
2008

MEMS Sensor for In Situ TEM Atomic Force Microscopy

Alexandra Nafari, David Karlén, Cristina Rusu et al
Journal of Microelectromechanical Systems. Vol. 17 (2), p. 328 - 333
Journal article
2008

MEMS-based VCSEL beam steering using replicated polymer diffractive lens

Karin Hedsten, Jonas Melin, Jörgen Bengtsson et al
Sensors and Actuators, A: Physical. Vol. 142 (1), p. 336-345
Journal article
2007

MEMS sensor for in situ TEM Atomic Force Microscopy

Alexandra Nafari, David Karlén, Cristina Rusu et al
IEEE 20th International Conference on Micro Electro Mechanical Systems, 2007. MEMS, p. 103-106
Paper in proceedings
2007

A Micromachined 94 GHz Dielectric Resonator Antenna for Focal Plane Array Applications

Jan Svedin, L. -G. Huss, David Karlén et al
IEEE MTT-S International Microwave Symposium Digest, p. 1375 - 1378
Paper in proceedings
2006

2D VCSEL beam steering using MEMS and replicated diffractive micro-optics

Karin Hedsten, Jörgen Bengtsson, David Karlén et al
XX Eurosensors, Göteborg, Sverige, 17-20 september 2006, p. T1C-03, 296-7-
Paper in proceedings
2006

Supporting structures for transmissive optical components in MEMS

Karin Hedsten, David Karlén, Peter Enoksson
17th MicroMechanics Europe (MME06) (Southampton, UK, Sept. 3-5, 2006), p. 69-72
Paper in proceedings
2006

2D laser beamsteering by integration of MEMS and diffractive optics

Karin Hedsten, Peter Modh, Jörgen Bengtsson et al
Micro Structure Workshop 2006 (MSW06), Västerås, Sverige, 9-10 maj, p. 59-C2a
Paper in proceedings
2006

Replication of continuous-profiled micro-optical elements for silicon integration

Karin Hedsten, Anders Magnusson, Jonas Melin et al
Applied Optics. Vol. 45 (1), p. 83-89
Journal article
2006

Refractive lenses in silicon micromachining by reflow of amorphous fluorocarbon polymer

Karin Hedsten, David Karlén, Peter Enoksson et al
Jornal of Micromechanics and Microengineering. Vol. 16 (6), p. S88-S95
Journal article
2005

Refractive Lenses in Silicon Micromachining by Reflow of Amorphous Fluorocarbon Polymer

Karin Hedsten, David Karlén, Peter Enoksson
Presented at Micromechanics Europe (MME05) (Göteborg, Sweden, Sept. 4-6, 2005)
Paper in proceedings
2005

Three-level Silicon Micromachining For 1.3 THz APEX Receiver Waveguide Components

David Karlén, Denis Meledin, Alexey Pavolotskiy et al
MicroMechanics Europe Workshop (MME05), (Göteborg, Sweden)
Paper in proceedings
2005

Microreplication in a silicon processing compatible polymer material

Jonas Melin, Karin Hedsten, Anders Magnusson et al
Jornal of Micromechanics and Microengineering. Vol. 15 (7), p. 116-121
Journal article
2005

Microreplication in a Silicon Processing Compatible Material

Jonas Melin, Karin Hedsten, Anders Magnusson et al
IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications, Oulu, Finland, 1-4 August 2005, p. 89-90
Paper in proceedings
2005

Microreplication in a Silicon Processing Compatible Polymer Material

Jonas Melin, Karin Hedsten, Anders Magnusson et al
IEEE Optical Mems, Uleåborg, Finland, 1-4 August
Paper in proceedings
2004

Replicated diffractive optical element in silicon micromachining

Karin Hedsten, Anders Magnusson, Jonas Melin et al
Micromechanics Europe (MME04) (Leuven, Belgium, 2004)
Paper in proceedings
2004

A novel technique for intégration of optical elements onto silicon

Karin Hedsten, Anders Magnusson, Jonas Melin et al
MSW04
Paper in proceedings

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