David Karlén

Publications (17)
Projects (0)

Showing 17 publications

2009

Boron impurity at the Si/SiO2 interface in SOI wafers and consequences for piezoresistive MEMS devices

Alexandra Nafari, David Karlén, Cristina Rusu et al

Journal of Micromechanics and Microengineering. Vol. 19 (1), p. 6-

Journal article

2008

MEMS Sensor for In Situ TEM Atomic Force Microscopy

Alexandra Nafari, David Karlén, Cristina Rusu et al

Journal of Microelectromechanical Systems. Vol. 17 (2), p. 328 - 333

Journal article

2008

MEMS-based VCSEL beam steering using replicated polymer diffractive lens

Karin Hedsten, Jonas Melin, Jörgen Bengtsson et al

Sensors and Actuators, A: Physical. Vol. 142 (1), p. 336-345

Journal article

2008

Boron at Si/SiO2 interface in SOI wafers and consequences for piezoresistive MEMS devices

Alexandra Nafari, David Karlén, Cristina Rusu et al

MicroMechanics Europe 2008

Paper in proceeding

2008

MEMS-based VCSEL beam steering using replicated polymer diffractive lens

Karin Hedsten, Jonas Melin, Jörgen Bengtsson et al

Sensors and Actuators, A: Physical. Vol. 142 (1), p. 336-345

Journal article

2007

MEMS sensor for in situ TEM Atomic Force Microscopy

Alexandra Nafari, David Karlén, Cristina Rusu et al

IEEE 20th International Conference on Micro Electro Mechanical Systems, 2007. MEMS, p. 103-106

Paper in proceeding

2007

A Micromachined 94 GHz Dielectric Resonator Antenna for Focal Plane Array Applications

Jan Svedin, L. -G. Huss, David Karlén et al

IEEE MTT-S International Microwave Symposium Digest, p. 1375 - 1378

Paper in proceeding

2006

Supporting structures for transmissive optical components in MEMS

Karin Hedsten, David Karlén, Peter Enoksson

17th MicroMechanics Europe (MME06) (Southampton, UK, Sept. 3-5, 2006), p. 69-72

Paper in proceeding

2006

Refractive lenses in silicon micromachining by reflow of amorphous fluorocarbon polymer

Karin Hedsten, David Karlén, Peter Enoksson et al

Jornal of Micromechanics and Microengineering. Vol. 16 (6), p. S88-S95

Journal article

2006

2D laser beamsteering by integration of MEMS and diffractive optics

Karin Hedsten, Peter Modh, Jörgen Bengtsson et al

Micro Structure Workshop 2006 (MSW06), Västerås, Sverige, 9-10 maj, p. 59-C2a

Paper in proceeding

2006

Replication of continuous-profiled micro-optical elements for silicon integration

Karin Hedsten, Anders Magnusson, Jonas Melin et al

Applied Optics. Vol. 45 (1), p. 83-89

Journal article

2006

2D VCSEL beam steering using MEMS and replicated diffractive micro-optics

Karin Hedsten, Jörgen Bengtsson, David Karlén et al

XX Eurosensors, Göteborg, Sverige, 17-20 september 2006, p. T1C-03, 296-7-

Paper in proceeding

2005

Refractive Lenses in Silicon Micromachining by Reflow of Amorphous Fluorocarbon Polymer

Karin Hedsten, David Karlén, Peter Enoksson

Presented at Micromechanics Europe (MME05) (Göteborg, Sweden, Sept. 4-6, 2005)

Paper in proceeding

2005

Microreplication in a silicon processing compatible polymer material

Jonas Melin, Karin Hedsten, Anders Magnusson et al

Jornal of Micromechanics and Microengineering. Vol. 15 (7), p. 116-121

Journal article

2005

Three-level Silicon Micromachining For 1.3 THz APEX Receiver Waveguide Components

David Karlén, Denis Meledin, Alexey Pavolotskiy et al

MicroMechanics Europe Workshop (MME05), (Göteborg, Sweden)

Paper in proceeding

2005

Microreplication in a Silicon Processing Compatible Material

Jonas Melin, Karin Hedsten, Anders Magnusson et al

IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications, Oulu, Finland, 1-4 August 2005, p. 89-90

Paper in proceeding

2004

Replicated diffractive optical element in silicon micromachining

Karin Hedsten, Anders Magnusson, Jonas Melin et al

Micromechanics Europe (MME04) (Leuven, Belgium, 2004)

Paper in proceeding

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