MEMS Sensor for In Situ TEM Atomic Force Microscopy
Journal article, 2008

Here, we present a MEMS atomic force microscope sensor for use inside a transmission electron microscope (TEM). This enables direct in situ TEM force measurements in the nanonewton range and thus mechanical characterization of nanosized structures. The main design challenges of the system and sensor are to reach a high sensitivity and to make a compact design that allows the sensor to be fitted in the narrow dimensions of the pole gap inside the TEM. In order to miniaturize the sensing device, an integrated detection with piezoresistive elements arranged in a full Wheatstone bridge was used. Fabrication of the sensor was done using standard micromachining techniques, such as ion implantation, oxide growth and deep reactive ion etch. We also present in situ TEM force measurements on nanotubes, which demonstrate the ability to measure spring constants of nanoscale systems.

nano wire characterization

AFM

force measurements

Transmission electron microscope (TEM)

MEMS

Author

Alexandra Nafari

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

David Karlén

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Cristina Rusu

Imego AB - The Institute of Micro and Nanotechnology

Krister Svensson

Karlstad University

Håkan Olin

Mid Sweden University

Peter Enoksson

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Journal of Microelectromechanical Systems

1057-7157 (ISSN)

Vol. 17 2 328 - 333

Subject Categories

Condensed Matter Physics

DOI

10.1109/JMEMS.2007.912714

More information

Latest update

5/23/2018