MEMS Sensor for In Situ TEM Atomic Force Microscopy
Journal article, 2008
nano wire characterization
AFM
force measurements
Transmission electron microscope (TEM)
MEMS
Author
Alexandra Nafari
Chalmers, Applied Physics, Electronics Material and Systems
David Karlén
Chalmers, Applied Physics, Electronics Material and Systems
Cristina Rusu
Imego AB - The Institute of Micro and Nanotechnology
Krister Svensson
Karlstad University
Håkan Olin
Mid Sweden University
Peter Enoksson
Chalmers, Applied Physics, Electronics Material and Systems
Journal of Microelectromechanical Systems
1057-7157 (ISSN)
Vol. 17 2 328 - 333Subject Categories
Condensed Matter Physics
DOI
10.1109/JMEMS.2007.912714