MEMS Sensor for In Situ TEM Atomic Force Microscopy
Artikel i vetenskaplig tidskrift, 2008

Here, we present a MEMS atomic force microscope sensor for use inside a transmission electron microscope (TEM). This enables direct in situ TEM force measurements in the nanonewton range and thus mechanical characterization of nanosized structures. The main design challenges of the system and sensor are to reach a high sensitivity and to make a compact design that allows the sensor to be fitted in the narrow dimensions of the pole gap inside the TEM. In order to miniaturize the sensing device, an integrated detection with piezoresistive elements arranged in a full Wheatstone bridge was used. Fabrication of the sensor was done using standard micromachining techniques, such as ion implantation, oxide growth and deep reactive ion etch. We also present in situ TEM force measurements on nanotubes, which demonstrate the ability to measure spring constants of nanoscale systems.

nano wire characterization


force measurements

Transmission electron microscope (TEM)



Alexandra Nafari

Chalmers, Teknisk fysik, Elektronikmaterial

David Karlén

Chalmers, Teknisk fysik, Elektronikmaterial

Cristina Rusu

Imego AB - The Institute of Micro and Nanotechnology

Krister Svensson

Karlstads universitet

Håkan Olin


Peter Enoksson

Chalmers, Teknisk fysik, Elektronikmaterial

Journal of Microelectromechanical Systems

1057-7157 (ISSN)

Vol. 17 2 328 - 333


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