David Karlén
Visar 17 publikationer
MEMS Sensor for In Situ TEM Atomic Force Microscopy
MEMS-based VCSEL beam steering using replicated polymer diffractive lens
MEMS-based VCSEL beam steering using replicated polymer diffractive lens
Boron at Si/SiO2 interface in SOI wafers and consequences for piezoresistive MEMS devices
MEMS sensor for in situ TEM Atomic Force Microscopy
A Micromachined 94 GHz Dielectric Resonator Antenna for Focal Plane Array Applications
Refractive lenses in silicon micromachining by reflow of amorphous fluorocarbon polymer
Replication of continuous-profiled micro-optical elements for silicon integration
2D laser beamsteering by integration of MEMS and diffractive optics
Supporting structures for transmissive optical components in MEMS
2D VCSEL beam steering using MEMS and replicated diffractive micro-optics
Refractive Lenses in Silicon Micromachining by Reflow of Amorphous Fluorocarbon Polymer
Microreplication in a silicon processing compatible polymer material
Three-level Silicon Micromachining For 1.3 THz APEX Receiver Waveguide Components
Microreplication in a Silicon Processing Compatible Material
Replicated diffractive optical element in silicon micromachining
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