Replication of continuous-profiled micro-optical elements for silicon integration
Journal article, 2006

Author

Karin Hedsten

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Anders Magnusson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Jonas Melin

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Jörgen Bengtsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Fredrik Nikolajeff

David Karlén

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Henrik Rödjegård

Gert Andersson

Applied Optics

Vol. 45 1 83-89

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/6/2017