Boron at Si/SiO2 interface in SOI wafers and consequences for piezoresistive MEMS devices
Paper in proceeding, 2008
SOI
Piezoresistive
Boron impurity
MEMS
Author
Alexandra Nafari
Chalmers, Applied Physics, Electronics Material and Systems
David Karlén
Chalmers, Microtechnology and Nanoscience (MC2)
Cristina Rusu
Krister Svensson
Peter Enoksson
Chalmers, Applied Physics, Electronics Material and Systems
MicroMechanics Europe 2008
Subject Categories
Condensed Matter Physics