Supporting structures for transmissive optical components in MEMS
Paper in proceeding, 2006
Author
Karin Hedsten
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
David Karlén
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
17th MicroMechanics Europe (MME06) (Southampton, UK, Sept. 3-5, 2006)
69-72
0854328483 (ISBN)
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
ISBN
0854328483