Supporting structures for transmissive optical components in MEMS
Paper in proceedings, 2006

Author

Karin Hedsten

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

David Karlén

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

17th MicroMechanics Europe (MME06) (Southampton, UK, Sept. 3-5, 2006)

69-72

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

ISBN

0854328483

More information

Created

10/6/2017