Supporting structures for transmissive optical components in MEMS
Paper in proceeding, 2006

Author

Karin Hedsten

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

David Karlén

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

17th MicroMechanics Europe (MME06) (Southampton, UK, Sept. 3-5, 2006)

69-72
0854328483 (ISBN)

Subject Categories (SSIF 2011)

Electrical Engineering, Electronic Engineering, Information Engineering

ISBN

0854328483

More information

Created

10/6/2017

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