Microreplication in a Silicon Processing Compatible Material
Paper in proceeding, 2005
We present a novel fabrication process for the integration of polymer micro-optical elements on silicon. The process relies on a reverse order protocol based on embossing in an amorphous fluorocarbon polymer, Cytop™.
Author
Jonas Melin
Uppsala University
Karin Hedsten
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Anders Magnusson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
David Karlén
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Henrik Rödjegård
Imego AB - The Institute of Micro and Nanotechnology
Katrin Persson
Imego AB - The Institute of Micro and Nanotechnology
Jörgen Bengtsson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Fredrik Nikolajeff
Uppsala University
IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications, Oulu, Finland, 1-4 August 2005
89-90
978-078039278-6 (ISBN)
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1109/OMEMS.2005.1540091
ISBN
978-078039278-6