Microreplication in a silicon processing compatible polymer material
Journal article, 2005
Author
Jonas Melin
Karin Hedsten
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Anders Magnusson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
David Karlén
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Henrik Rödjegård
Katrin Persson
Jörgen Bengtsson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Fredrik Nikolajeff
Jornal of Micromechanics and Microengineering
Vol. 15 7 116-121
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering