MEMS sensor for in situ TEM Atomic Force Microscopy
Paper in proceeding, 2007
Atomic Force Microscopy (AFM)
MEMS
in situ
Transmission Electron Microscope (TEM)
Author
Alexandra Nafari
Chalmers, Applied Physics, Electronics Material and Systems
David Karlén
Chalmers, Microtechnology and Nanoscience (MC2)
Cristina Rusu
Krister Svensson
Håkan Olin
Peter Enoksson
Chalmers, Applied Physics, Electronics Material and Systems
IEEE 20th International Conference on Micro Electro Mechanical Systems, 2007. MEMS
1084-6999 (ISSN)
103-106Subject Categories
Condensed Matter Physics