MEMS sensor for in situ TEM Atomic Force Microscopy
Paper in proceedings, 2007

Abstract Here we present a MEMS atomic force microscope (AFM) sensor for use inside a transmission electron microscope (TEM). This enables direct in situ TEM force measurements in the nN range. The main design challenges of the sensor are a high sensitivity and the narrow dimensions of the pole gap inside the TEM. Fabrication of the sensor was done using standard micromachining techniques, such as ion implantation, oxide growth and deep reactive ion etch. We present in situ TEM force measurements on nanotubes, which demonstrates the ability to measure spring constants of nanoscale systems.

Atomic Force Microscopy (AFM)

MEMS

in situ

Transmission Electron Microscope (TEM)

Author

Alexandra Nafari

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

David Karlén

Chalmers, Microtechnology and Nanoscience (MC2)

Cristina Rusu

Krister Svensson

Håkan Olin

Peter Enoksson

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

IEEE 20th International Conference on Micro Electro Mechanical Systems, 2007. MEMS

1084-6999 (ISSN)

103-106

Subject Categories

Condensed Matter Physics

More information

Created

10/7/2017