Three-level Silicon Micromachining For 1.3 THz APEX Receiver Waveguide Components
Paper in proceeding, 2005
Author
David Karlén
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Denis Meledin
Chalmers, Department of Radio and Space Science, Advanced Receiver Development
Alexey Pavolotskiy
Chalmers, Department of Radio and Space Science, Advanced Receiver Development
Victor Belitsky
Chalmers, Department of Radio and Space Science
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
MicroMechanics Europe Workshop (MME05), (Göteborg, Sweden)
9163175533 (ISBN)
Areas of Advance
Information and Communication Technology
Nanoscience and Nanotechnology
Production
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
Fusion, Plasma and Space Physics
Infrastructure
Nanofabrication Laboratory
ISBN
9163175533