Three-level Silicon Micromachining For 1.3 THz APEX Receiver Waveguide Components
Paper in proceedings, 2005

Author

David Karlén

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Denis Meledin

Chalmers, Department of Radio and Space Science, Advanced Receiver Development

Alexey Pavolotskiy

Chalmers, Department of Radio and Space Science, Advanced Receiver Development

Victor Belitsky

Chalmers, Department of Radio and Space Science

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

MicroMechanics Europe Workshop (MME05), (Göteborg, Sweden)

Areas of Advance

Information and Communication Technology

Nanoscience and Nanotechnology (2010-2017)

Production

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

Fusion, Plasma and Space Physics

Infrastructure

Nanofabrication Laboratory

ISBN

9163175533

More information

Created

10/8/2017