2D laser beamsteering by integration of MEMS and diffractive optics
Paper in proceedings, 2006

Author

Karin Hedsten

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Peter Modh

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Jörgen Bengtsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

David Karlén

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Katrin Persson

Jonas Melin

Richard Nilsson

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Fredrik Nikolajeff

Micro Structure Workshop 2006 (MSW06), Västerås, Sverige, 9-10 maj

59-C2a

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/7/2017