Refractive Lenses in Silicon Micromachining by Reflow of Amorphous Fluorocarbon Polymer
Paper in proceedings, 2005

Author

Karin Hedsten

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

David Karlén

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Presented at Micromechanics Europe (MME05) (Göteborg, Sweden, Sept. 4-6, 2005)

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/7/2017