Replicated diffractive optical element in silicon micromachining
Paper in proceedings, 2004

Author

Karin Hedsten

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Anders Magnusson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Jonas Melin

Henrik Rödjegård

Gert Andersson

Jörgen Bengtsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Fredrik Nikolajeff

David Karlén

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Micromechanics Europe (MME04) (Leuven, Belgium, 2004)

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/6/2017