Highly conformal fabrication of nanopatterns on non-planar surfaces
Journal article, 2016
Author
Ines Massiot
Chalmers, Physics, Bionanophotonics
C. Trompoukis
Interuniversity Micro-Electronics Center at Leuven
Kristof Lodewijks
Chalmers, Physics, Bionanophotonics
V. Depauw
Interuniversity Micro-Electronics Center at Leuven
Alexander Dmitriev
Chalmers, Physics, Bionanophotonics
Nanoscale
2040-3364 (ISSN) 2040-3372 (eISSN)
Vol. 8 22 11461-11466Subject Categories
Physical Sciences
DOI
10.1039/c6nr00749j