Continuous-Gradient Plasmonic Nanostructures Fabricated by Evaporation on a Partially Exposed Rotating Substrate
Journal article, 2016

Evaporation on a partially exposed rotating substrate (PERS) was used to generate continuous and precise gradients in nanoscale structure parameters. All materials (gold, chromium, alumina, and silver) were deposited in an electron beam evaporation system with stage rotation and tilt possibilities. All evaporations were performed at a high vacuum. To fabricate nanostructures on a glass substrates by HCL, the substrate was first spin-coated with a layer of 950 PMMA and wetted with a poly(diallyldimethylammonium chloride) (PDDA) solution. Negatively charged PS beads were then drop casted and self-assembled on the surface. A thin layer of metal (gold or chromium) was evaporated to act as a mask. The beads were removed by tape stripping, resulting in a mask with holes arranged in a pattern determined by the colloidal particles. The PMMA situated underneath the holes in the film was removed by oxygen plasma etching. Due to the continuous characteristic of the gradients, high precision in the geometric parameters of fabricated nanostructures can be achieved.

plasmonic nanostructures

electron-beam evaporation

hole-mask colloidal lithography

continuous parameter tuning

gradient metasurfaces

Author

Robin Ogier

Chalmers, Physics, Bionanophotonics

Lei Shao

Chalmers, Physics, Bionanophotonics

Mikael Svedendahl

Chalmers, Physics, Bionanophotonics

Mikael Käll

Chalmers, Physics, Bionanophotonics

Advanced Materials

09359648 (ISSN) 15214095 (eISSN)

Vol. 28 23 4658-4664

Subject Categories

Physical Sciences

DOI

10.1002/adma.201600112

PubMed

27061280

More information

Created

10/7/2017