Dynamic laser speckle as a detrimental phenomenon in optical projection lithography
Journal article, 2006

excimer lasers

illuminator intensity distribution

dose control

line edge roughness

partially coherent optical field

microlens arrays

optical projection lithography

illumination conditions

spectral linewidth

dynamic laser speckle

Author

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[Person 7e8a04ba-10f1-4c35-b93d-bcade3aa346f not found]

[Person f8e41c1f-e586-4f08-b2c8-e48714318bfb not found]

Journal of Microlithography, Microfabrication and Microsystems

1537-1646 (ISSN)

Vol. 5 3 33004-1-8-

Subject Categories (SSIF 2011)

Telecommunications

Atom and Molecular Physics and Optics

More information

Created

10/6/2017

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