Formal definitions of edge-based geometric design rules
Journal article, 1993
Process design
Integrated circuit layout
Very large scale integration
Computer aided manufacturing
Integrated circuit yield
Fabrication
Design methodology
Manufacturing processes
Production
Design automation
Author
Nils Hedenstierna
Department of Solid State Electronics
Sven Christensson
Department of Solid State Electronics
Kjell Jeppson
Department of Solid State Electronics
Department of Microelectronics and Nanoscience
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
0278-0070 (ISSN) 19374151 (eISSN)
Vol. 12 1 59-69Subject Categories
Computer and Information Science
Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1109/43.184843