Encapsulation of graphene in Parylene

Journal article, 2017

Graphene encapsulated between flakes of hexagonal boron nitride (hBN) demonstrates the highest known mobility of charge carriers. However, the technology is not scalable to allow for arrays of devices. We are testing a potentially scalable technology for encapsulating graphene where we replace hBN with Parylene while still being able to make low-ohmic edge contacts. The resulting encapsulated devices show low parasitic doping and a robust Quantum Hall effect in relatively low magnetic fields <5 T.