SU-8 free-standing microfluidic probes
Journal article, 2017

We present a process for fabrication of free-standing SU-8 probes, with a dry, mechanical release of the final micro-devices. The process utilizes the thermal release tape, a commonly used cleanroom material, for facile heat-release from the sacrificial layer. For characterization of the SU-8 microfluidic probes, two liquid interfaces were designed: a disposable interface with integrated wells and an interface with external liquid reservoirs. The versatility of the fabrication and the release procedures was illustrated by further developing the process to functionalize the SU-8 probes for impedance sensing, by integrating metal thin-film electrodes. An additional interface scheme which contains electronic components for impedance measurements was developed. We investigated the possibilities of introducing perforations in the SU-8 device by photolithography, for solution sampling predominantly by diffusion. The SU-8 processes described here allow for a convenient batch production of versatile free-standing microfluidic devices with well-defined tip-geometry. (C) 2017 Author(s).

surfaces

Biochemistry & Molecular Biology

devices

fabrication

technology

Biophysics

high-throughput

cell analysis

multifunctional pipette

single cells

microstructures

sensor

Author

Anna Kim

Chalmers, Chemistry and Chemical Engineering, Chemistry and Biochemistry, Physical Chemistry

Kiryl Kustanovich

Chalmers, Chemistry and Chemical Engineering, Chemistry and Biochemistry, Physical Chemistry

D. Baratian

MESA Institute for Nanotechnology

Alar Ainla

Chalmers, Chemistry and Chemical Engineering, Chemistry and Biochemistry, Physical Chemistry

Mehrnaz Shaali

Chalmers, Chemistry and Chemical Engineering, Chemistry and Biochemistry, Physical Chemistry

Gavin Jeffries

Chalmers, Chemistry and Chemical Engineering, Chemistry and Biochemistry, Physical Chemistry

Aldo Jesorka

Chalmers, Chemistry and Chemical Engineering, Chemistry and Biochemistry, Physical Chemistry

Biomicrofluidics

1932-1058 (ISSN)

Vol. 11 1 014112

Subject Categories

Textile, Rubber and Polymeric Materials

Materials Chemistry

Areas of Advance

Materials Science

DOI

10.1063/1.4975026

More information

Latest update

5/23/2018