Navigation aids in the search for future high-k dielectrics: physical and electrical trends
Journal article, 2006
From experimental literature data on metal oxides combined
with theoretical estimates, we present empirical relations for k-values and energy band offset values, that can be used in the search for gate dielectric materials fulfilling the needs of future CMOS generations. Only a few materials investigated so far have properties meeting the demands for k and energy band offset values in the development of CMOS down to 22 nm.
Physical Properties of Dielectrics