A method to evaluate MEMS bonding
Paper in proceeding, 2006
Author
Farzan Alavian Ghavanini
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Cristina Rusu
Katrin Persson
Sjoerd Hassl
Henrik Rödjegård
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Micro Structure Workshop 2006
Vol. 1 1 47-B3d
Subject Categories
Other Engineering and Technologies not elsewhere specified