Application of SOI based sensors for MEMS wafer-level packaging
Journal article, 2006
Author
Farzan Alavian Ghavanini
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Cristina Rusu
Katrin Persson
Sjoerd Hassl
Henrik Rödjegård
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
EuroSOI conference proceedings
Vol. 1 1 115,116-
Subject Categories
Other Engineering and Technologies not elsewhere specified