Extracting the relative dielectric constant for “high-k layers”from CV measurements – errors and error propagation
Journal article, 2007
Author
Octavian Buiu
Chalmers, Microtechnology and Nanoscience (MC2)
S. Hall
Olof Engström
Solid State Electronics
Bahman Raeissi
Solid State Electronics
Max Lemme
Chalmers, Microtechnology and Nanoscience (MC2)
Paul Hurley
Chalmers, Microtechnology and Nanoscience (MC2)
Karim Cherkaoui
Chalmers, Microtechnology and Nanoscience (MC2)
Microelectronics Reliability
Vol. 47 678-
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering