Extracting the relative dielectric constant for “high-k layers”from CV measurements – errors and error propagation
Journal article, 2007

Author

Octavian Buiu

Chalmers, Microtechnology and Nanoscience (MC2)

S. Hall

Olof Engström

Solid State Electronics

Bahman Raeissi

Solid State Electronics

Max Lemme

Chalmers, Microtechnology and Nanoscience (MC2)

Paul Hurley

Chalmers, Microtechnology and Nanoscience (MC2)

Karim Cherkaoui

Chalmers, Microtechnology and Nanoscience (MC2)

Microelectronics Reliability

Vol. 47 678-

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/6/2017