Silicon straight tube fluid density sensor
Paper in proceedings, 2007

MEMS sensor

fabrication

density

microtube.

Author

Mohammad Najmzadeh

Chalmers, Microtechnology and Nanoscience (MC2)

Sjoerd Haasl

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2)

proceedings of the 6th IEEE conference on sensors, Oct. 28-31, 2007, Atlanta

Vol. 1 1185-1188

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/8/2017