Silicon straight tube fluid density sensor

Mohammad Najmzadeh; Sjoerd Haasl; Peter Enoksson

Silicon straight tube fluid density sensor
Paper in proceeding, 2007

MEMS sensor

fabrication

density

microtube.

Author

Mohammad Najmzadeh

Chalmers, Microtechnology and Nanoscience (MC2)

Other publications Research

Sjoerd Haasl

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2)

Other publications Research

proceedings of the 6th IEEE conference on sensors, Oct. 28-31, 2007, Atlanta

Vol. 1 1185-1188

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/8/2017

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Silicon straight tube fluid density sensor Paper in proceeding, 2007