Air-Oxidation of Nb Nano-Films
Journal article, 2018

X-ray photoelectron spectroscopy (XPS) depth chemical and phase profiling of air-oxidized niobium nanofilms has been performed. It is found that oxide layer thicknesses depend on the initial thickness of the niobium nanofilm. The increase in thickness of the initial Nb nano-layer is due to increase in thickness of an oxidized layer.

Author

A. Lubenschenko

National Research University Moscow Power Engineering Institute

A Batrakov

National Research University Moscow Power Engineering Institute

Dmitriy Ivanov

National Research University Moscow Power Engineering Institute

Olga Lubenchenko

National Research University Moscow Power Engineering Institute

I. A. Lashkov

National Research University Moscow Power Engineering Institute

Alexey Pavolotskiy

Chalmers, Space, Earth and Environment, Onsala Space Observatory, GARD Technology

B. Schleicher

Leibniz Institute for Solid State and Materials Research Dresedn

N. Albert

Leibniz Institute for Solid State and Materials Research Dresedn

K. Nielsch

Leibniz Institute for Solid State and Materials Research Dresedn

Semiconductors

1063-7826 (ISSN) 1090-6479 (eISSN)

Vol. 52 5 678-682

Subject Categories

Inorganic Chemistry

Materials Chemistry

Other Chemical Engineering

DOI

10.1134/S1063782618050196

More information

Latest update

9/2/2019 3