Air-Oxidation of Nb Nano-Films
Journal article, 2018
X-ray photoelectron spectroscopy (XPS) depth chemical and phase profiling of air-oxidized niobium nanofilms has been performed. It is found that oxide layer thicknesses depend on the initial thickness of the niobium nanofilm. The increase in thickness of the initial Nb nano-layer is due to increase in thickness of an oxidized layer.
Author
A. Lubenschenko
National Research University Moscow Power Engineering Institute
A Batrakov
National Research University Moscow Power Engineering Institute
Dmitriy Ivanov
National Research University Moscow Power Engineering Institute
Olga Lubenchenko
National Research University Moscow Power Engineering Institute
I. A. Lashkov
National Research University Moscow Power Engineering Institute
Alexey Pavolotskiy
Chalmers, Space, Earth and Environment, Onsala Space Observatory
B. Schleicher
Leibniz Institute for Solid State and Materials Research Dresedn
N. Albert
Leibniz Institute for Solid State and Materials Research Dresedn
K. Nielsch
Leibniz Institute for Solid State and Materials Research Dresedn
Semiconductors
1063-7826 (ISSN) 1090-6479 (eISSN)
Vol. 52 5 678-682Subject Categories
Inorganic Chemistry
Materials Chemistry
Other Chemical Engineering
DOI
10.1134/S1063782618050196