Air-Oxidation of Nb Nano-Films
Artikel i vetenskaplig tidskrift, 2018

X-ray photoelectron spectroscopy (XPS) depth chemical and phase profiling of air-oxidized niobium nanofilms has been performed. It is found that oxide layer thicknesses depend on the initial thickness of the niobium nanofilm. The increase in thickness of the initial Nb nano-layer is due to increase in thickness of an oxidized layer.

Författare

A. Lubenschenko

National Research University Moscow Power Engineering Institute

A Batrakov

National Research University Moscow Power Engineering Institute

Dmitriy Ivanov

National Research University Moscow Power Engineering Institute

Olga Lubenchenko

National Research University Moscow Power Engineering Institute

I. A. Lashkov

National Research University Moscow Power Engineering Institute

Alexey Pavolotskiy

GARD teknik

B. Schleicher

Leibniz-Institut fur Festkorper- und Werkstoffforschung Dresden

N. Albert

Leibniz-Institut fur Festkorper- und Werkstoffforschung Dresden

K. Nielsch

Leibniz-Institut fur Festkorper- und Werkstoffforschung Dresden

Semiconductors

1063-7826 (ISSN) 1090-6479 (eISSN)

Vol. 52 678-682

Ämneskategorier

Oorganisk kemi

Materialkemi

Annan kemiteknik

DOI

10.1134/S1063782618050196