A Micromachined Coupled-Cantilever for Piezoelectric Energy Harvesters
Journal article, 2018

This paper presents a demonstration of the feasibility of fabricating micro-cantilever harvesters with extended stress distribution and enhanced bandwidth by exploiting an M-shaped two-degrees-of-freedom design. The measured mechanical response of the fabricated device displays the predicted dual resonance peak behavior with the fundamental peak at the intended frequency. This design has the features of high energy conversion efficiency in a miniaturized environment where the available vibrational energy varies in frequency. It makes such a design suitable for future large volume production of integrated self powered sensors nodes for the Internet-of-Things.

bandwidth broadening

finite element modeling

coupled cantilevers

lead zirconate titanate

piezoelectric micro-energy harvester

microelectromechanical systems (MEMS)

enhanced stress distribution

Author

Agin Vyas

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Henrik Staaf

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Cristina Rusu

RISE Research Institutes of Sweden

Thorbjoern Ebefors

MyVox AB

Jessica Liljeholm

Silex Microsystems AB

Anderson David Smith

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Per Lundgren

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Micromachines

2072-666X (ISSN)

Vol. 9 5 252

Subject Categories

Computer Engineering

Embedded Systems

Other Electrical Engineering, Electronic Engineering, Information Engineering

Driving Forces

Sustainable development

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Transport

Production

Energy

Infrastructure

Nanofabrication Laboratory

DOI

10.3390/mi9050252

More information

Latest update

10/3/2019