High-confinement high-Q silicon-rich silicon nitride nonlinear microresonators
Paper in proceeding, 2018
We show our results on high-Q high-confinement microresonators based on the silicon-rich silicon nitride (SiRN) platform, featuring broad anomalous dispersion and an enhanced nonlinear Kerr coefficient with respect to stoichiometric Si3N4 technology.
Author
Victor Torres Company
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Zhichao Ye
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Attila Fülöp
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Clemens Krückel
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Peter Andrekson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Optics InfoBase Conference Papers
21622701 (eISSN)
Vol. Part F101-IPRSN 2018 2018978-155752820-9 (ISBN)
Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2018
Zurich, Switzerland,
Zurich, Switzerland,
Areas of Advance
Information and Communication Technology
Nanoscience and Nanotechnology
Subject Categories
Energy Engineering
Ceramics
Other Physics Topics
Roots
Basic sciences
Infrastructure
Nanofabrication Laboratory
DOI
10.1364/IPRSN.2018.ITh2J.2