High-confinement high-Q silicon-rich silicon nitride nonlinear microresonators
Paper in proceedings, 2018

We show our results on high-Q high-confinement microresonators based on the silicon-rich silicon nitride (SiRN) platform, featuring broad anomalous dispersion and an enhanced nonlinear Kerr coefficient with respect to stoichiometric Si3N4 technology.

Author

Victor Torres Company

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Zhichao Ye

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Attila Fülöp

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Clemens Krückel

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Peter Andrekson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Optics InfoBase Conference Papers

Vol. Part F101-IPRSN 2018 2018

Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2018
Zurich, Switzerland,

Areas of Advance

Information and Communication Technology

Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)

Subject Categories

Energy Engineering

Ceramics

Other Physics Topics

Roots

Basic sciences

Infrastructure

Nanofabrication Laboratory

DOI

10.1364/IPRSN.2018.ITh2J.2

More information

Latest update

1/11/2021