Nb/Al-AlN/Nb superconducting tunnel junctions: fabrication process and characterization results
Paper in proceeding, 2018
Author
Alexey Pavolotskiy
Chalmers, Space, Earth and Environment, Onsala Space Observatory
Vincent Desmaris
Chalmers, Space, Earth and Environment, Onsala Space Observatory
Victor Belitsky
Chalmers, Space, Earth and Environment, Onsala Space Observatory
2018 29th IEEE International Symposium on Space Terahertz Technology, ISSTT 2018
Vol. 2018 107-111
Pasadena, USA,
Subject Categories
Other Engineering and Technologies not elsewhere specified
Nano Technology
Infrastructure
Onsala Space Observatory
Nanofabrication Laboratory