Mid-infrared microspectrometers based on an array of differently tuned integrated metamaterial absorbers
Paper in proceeding, 2018
Integration of an array of differently tuned mid-infrared metamaterial-based absorbers on top of thermopile detector arrays in a compatible fabrication process is presented. UV lithography is used for patterning over large areas with high throughput.
metamaterials
Fabrication process
matematerial absorbers
Detector arrays
optical materials
Author
Mohammadamir Ghaderi
Delft University of Technology
Ehsan Karimi Shahmarvandi
Delft University of Technology
Reinoud F. Wolffenbuttel
Delft University of Technology
Optics InfoBase Conference Papers
21622701 (eISSN)
978-155752820-9 (ISBN)
Novel Optical Materials and Applications, NOMA 2018
Zurich, Switzerland,
Zurich, Switzerland,
Subject Categories
Atom and Molecular Physics and Optics
DOI
10.1364/NOMA.2018.NoW1D.3