Mid-infrared microspectrometers based on an array of differently tuned integrated metamaterial absorbers
Paper i proceeding, 2018

Integration of an array of differently tuned mid-infrared metamaterial-based absorbers on top of thermopile detector arrays in a compatible fabrication process is presented. UV lithography is used for patterning over large areas with high throughput.

metamaterials

Fabrication process

matematerial absorbers

Detector arrays

optical materials

Författare

Mohammadamir Ghaderi

TU Delft

Ehsan Karimi Shahmarvandi

TU Delft

Reinoud F. Wolffenbuttel

TU Delft

Optics InfoBase Conference Papers

21622701 (eISSN)


978-155752820-9 (ISBN)

Novel Optical Materials and Applications, NOMA 2018
Zurich, Switzerland,

Ämneskategorier

Atom- och molekylfysik och optik

DOI

10.1364/NOMA.2018.NoW1D.3

Mer information

Senast uppdaterat

2022-06-23