Fabrication and characterization of MEMS airgap-based optical filters for the UV spectral range
Paper in proceeding, 2017
Airgap optical filters
UV spectral range
Optical bandwidth
Optical MEMS
Distributed Bragg reflector
UV filters
Author
Mohammadamir Ghaderi
Delft University of Technology
Reinoud F Wolffenbuttel
Delft University of Technology
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
1959-1962
978-153862731-0 (ISBN)
Kaohsiung, Taiwan,
Subject Categories
Atom and Molecular Physics and Optics
Other Physics Topics
Other Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1109/TRANSDUCERS.2017.7994453