Fabrication and characterization of MEMS airgap-based optical filters for the UV spectral range
Paper in proceeding, 2017

This paper presents the design, fabrication, and characterization of MEMS airgap-based optical filters designed for the ultraviolet (UV) spectral range. Optical design, process conditions, and material choice have been optimized for obtaining large-area and optically flat membranes. Several distributed Bragg reflectors centered at λ=400 nm were designed using silicon oxide and nitride layers as the membrane materials. Airgap Bragg reflectors with up to 80% fill-factor were fabricated in standard Si technology and the spectral reflectance of the reflectors were compared. The optical characterization demonstrated a high reflectance (up to 80%) with only a few number of layers over a bandwidth of up to 175 nm in the UV spectral range.

Airgap optical filters

UV spectral range

Optical bandwidth

Optical MEMS

Distributed Bragg reflector

UV filters

Author

Mohammadamir Ghaderi

Delft University of Technology

Reinoud F Wolffenbuttel

Delft University of Technology

TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

1959-1962
978-153862731-0 (ISBN)

TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
Kaohsiung, Taiwan,

Subject Categories

Atom and Molecular Physics and Optics

Other Physics Topics

Other Electrical Engineering, Electronic Engineering, Information Engineering

DOI

10.1109/TRANSDUCERS.2017.7994453

More information

Latest update

4/14/2022