Fabrication and characterization of MEMS airgap-based optical filters for the UV spectral range
Paper i proceeding, 2017
Airgap optical filters
UV spectral range
Optical bandwidth
Optical MEMS
Distributed Bragg reflector
UV filters
Författare
Mohammadamir Ghaderi
TU Delft
Reinoud F Wolffenbuttel
TU Delft
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
1959-1962
978-153862731-0 (ISBN)
Kaohsiung, Taiwan,
Ämneskategorier
Atom- och molekylfysik och optik
Annan fysik
Annan elektroteknik och elektronik
DOI
10.1109/TRANSDUCERS.2017.7994453