A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy
Paper in proceeding, 2017
Author
J. Mandon
Radboud University
N.P. Ayerden
Delft University of Technology
Mohammadamir Ghaderi
Delft University of Technology
F. J. M. Harren
Radboud University
Reinoud F. Wolffenbuttel
Delft University of Technology
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
10846999 (ISSN)
1052-1055978-150905078-9 (ISBN)
Las Vegas, USA,
Subject Categories
Atom and Molecular Physics and Optics
Information Science
Control Engineering
Other Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1109/MEMSYS.2017.7863593