A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy
Paper in proceeding, 2017

This paper demonstrates the functional integration of a linear variable optical filter (LVOF) and a gas cell at the wafer level, i.e. a gas-filled LVOF, where the resonator cavity of the filter is also used for storing the gas sample. A mm-level effective optical absorption path length is achieved from a μm-level physical path length, by exploiting multiple reflections from highly reflective Bragg mirrors and the high-order operation of the filter. The wideband spectral response of the device is ensured by using a tapered cavity, where the cavity length changes linearly along the length of the filter. Therefore, combined with a detector array and a light source, the gas-filled LVOF enables wideband operation and long absorption path in a single MEMS device, thus ensuring a highly sensitive on-chip gas absorption microspectrometer.

Author

J. Mandon

Radboud University

N.P. Ayerden

Delft University of Technology

Mohammadamir Ghaderi

Delft University of Technology

F. J. M. Harren

Radboud University

Reinoud F. Wolffenbuttel

Delft University of Technology

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

10846999 (ISSN)

1052-1055
978-150905078-9 (ISBN)

30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Las Vegas, USA,

Subject Categories

Atom and Molecular Physics and Optics

Information Science

Control Engineering

Other Electrical Engineering, Electronic Engineering, Information Engineering

DOI

10.1109/MEMSYS.2017.7863593

More information

Latest update

4/14/2022