Thermal annealing of thin PECVD silicon-oxide films for airgap-based optical filters
Journal article, 2016
PECVD
silicon-oxide
thermal annealing
airgap optical filters
thin-film membranes
residual stress
Author
Mohammadamir Ghaderi
Delft University of Technology
Ger de Graaf
Delft University of Technology
Reinoud F. Wolffenbuttel
Delft University of Technology
Journal of Micromechanics and Microengineering
0960-1317 (ISSN) 13616439 (eISSN)
Vol. 26 8 084009Subject Categories
Other Materials Engineering
Other Medical Biotechnology
Other Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1088/0960-1317/26/8/084009