Thermal annealing of thin PECVD silicon-oxide films for airgap-based optical filters
Journal article, 2016


Mohammadamir Ghaderi

Delft University of Technology

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Ger de Graaf

Delft University of Technology

Reinoud F. Wolffenbuttel

Delft University of Technology

Journal of Micromechanics and Microengineering

0960-1317 (ISSN)

Vol. 26

Subject Categories

Other Materials Engineering

Other Medical Biotechnology

Other Electrical Engineering, Electronic Engineering, Information Engineering

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