Surface Roughening with Iron Nanoparticles for Promoted Adhesion of Spin Coated Microsupercapacitor Electrodes
Paper in proceedings, 2019

Microsupercapacitors (MSCs) are miniaturized energy storage devices that can be integrated in an on-chip platform as a component of a power supply for Internet of things' sensors. Integration of these on-chip MSCs require them to be fabricated through CMOS compatible fabrication techniques such as spin coating. One of the biggest challenges in spin coated MSCs is the poor surface adhesion. In this work, we present a CMOS compatible electrode deposition process with enhanced adhesion and retention for reduced graphene oxide (rGO) using spin coating. In order to improve the adhesion and surface uniformity of the deposited electrode material, the surface of Si/SiO 2 wafers was subjected to roughening through Fe nanoparticle formation. A 4 nm thick Fe layer deposition substantially magnified the average mean surface roughness of the substrates. In comparison with substrates without the Fe deposition, the treated ones have more than 300% improvement in surface coverage and rGO mass retention after sonication testing. These results suggest that the surface roughening has a positive influence on electrode deposition via a spin-coating method.

microelectromechanical systems (MEMS)

adhesion

microscale

Fe

Author

Agin Vyas

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Qi Li

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

F. Cornaglia

Polytechnic University of Turin

K. Wang

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

A. Anderson

University of California

Mohammad Mazharul Haque

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Volodymyr Kuzmenko

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Anderson David Smith

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Per Lundgren

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

MRS Advances

20598521 (eISSN)

Vol. 4 23 1335-1340

Subject Categories

Manufacturing, Surface and Joining Technology

Materials Chemistry

Medical Materials

DOI

10.1557/adv.2019.5

More information

Latest update

7/2/2019 8