Molecular beam epitaxy growth of GaSb1-xBix without rotation
Journal article, 2019

GaSb1-xBix thin film was grown on a 2 inch GaSb substrate by molecular beam epitaxy (MBE) without substrate rotation. Bi composition is found to vary from 2.76% to 3.98% across the wafer. The distribution of Bi content is mainly determined by spatial non-uniformity of Sb/Ga flux ratio, while Bi flux has slightly influence. Ostwald ripening process is confirmed to be reason for bigger Bi droplets via Bi surface diffusion. With the increase of Sb/Ga flux ratio, Ostwald ripening process is suppressed. At high Bi flux, excess Ga atoms accumulate on surface and form droplets.

Bi incorporation

Sb/Ga flux ratio

Bi flux

Stationary growth


Molecular beam epitaxy


Chaodan Chi

Chinese Academy of Sciences

L. Yue

Chinese Academy of Sciences

Yanchao Zhang

Semiconductor Materials Co., Ltd

ShanghaiTech University

Z. Zhang

ShanghaiTech University

Chinese Academy of Sciences

Xin Ou

Chinese Academy of Sciences

Shu Min Wang

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Chinese Academy of Sciences


0042-207X (ISSN)

Vol. 168 108819

Subject Categories

Inorganic Chemistry

Polymer Technologies

Materials Chemistry



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