Nano–opto-electro-mechanical switches operated at CMOS-level voltages
Journal article, 2019
Author
Christian Haffner
Swiss Federal Institute of Technology in Zürich (ETH)
National Institute of Standards and Technology (NIST)
University of Maryland
Andreas Joerg
Swiss Federal Institute of Technology in Zürich (ETH)
Michael Doderer
Swiss Federal Institute of Technology in Zürich (ETH)
Felix Mayor
E.L. Ginzton Lab
Swiss Federal Institute of Technology in Zürich (ETH)
Daniel Chelladurai
Swiss Federal Institute of Technology in Zürich (ETH)
Yuriy Fedoryshyn
Swiss Federal Institute of Technology in Zürich (ETH)
Cosmin Ioan Roman
Swiss Federal Institute of Technology in Zürich (ETH)
Mikael Mazur
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Maurizio Burla
Swiss Federal Institute of Technology in Zürich (ETH)
Henri J. Lezec
National Institute of Standards and Technology (NIST)
Vladimir A. Aksyuk
National Institute of Standards and Technology (NIST)
Juerg Leuthold
Swiss Federal Institute of Technology in Zürich (ETH)
Science
0036-8075 (ISSN) 1095-9203 (eISSN)
Vol. 366 6467 860-864Subject Categories
Atom and Molecular Physics and Optics
Other Physics Topics
Condensed Matter Physics
DOI
10.1126/science.aay8645
PubMed
31727832