Nano–opto-electro-mechanical switches operated at CMOS-level voltages
Artikel i vetenskaplig tidskrift, 2019

Combining reprogrammable optical networks with complementary metal-oxide semiconductor (CMOS) electronics is expected to provide a platform for technological developments in on-chip integrated optoelectronics. We demonstrate how opto-electro-mechanical effects in micrometer-scale hybrid photonic-plasmonic structures enable light switching under CMOS voltages and low optical losses (0.1 decibel). Rapid (for example, tens of nanoseconds) switching is achieved by an electrostatic, nanometer-scale perturbation of a thin, and thus low-mass, gold membrane that forms an air-gap hybrid photonic-plasmonic waveguide. Confinement of the plasmonic portion of the light to the variable-height air gap yields a strong opto-electro-mechanical effect, while photonic confinement of the rest of the light minimizes optical losses. The demonstrated hybrid architecture provides a route to develop applications for CMOS-integrated, reprogrammable optical systems such as optical neural networks for deep learning.

Författare

Christian Haffner

Eidgenössische Technische Hochschule Zürich (ETH)

National Institute of Standards and Technology

University of Maryland

Andreas Joerg

Eidgenössische Technische Hochschule Zürich (ETH)

Michael Doderer

Eidgenössische Technische Hochschule Zürich (ETH)

Felix Mayor

E.L. Ginzton Lab

Eidgenössische Technische Hochschule Zürich (ETH)

Daniel Chelladurai

Eidgenössische Technische Hochschule Zürich (ETH)

Yuriy Fedoryshyn

Eidgenössische Technische Hochschule Zürich (ETH)

Cosmin Ioan Roman

Eidgenössische Technische Hochschule Zürich (ETH)

Mikael Mazur

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Maurizio Burla

Eidgenössische Technische Hochschule Zürich (ETH)

Henri J. Lezec

National Institute of Standards and Technology

Vladimir A. Aksyuk

National Institute of Standards and Technology

Juerg Leuthold

Eidgenössische Technische Hochschule Zürich (ETH)

Science

0036-8075 (ISSN)

Vol. 366 6467 860-864

Ämneskategorier

Atom- och molekylfysik och optik

Annan fysik

Den kondenserade materiens fysik

DOI

10.1126/science.aay8645

PubMed

31727832

Mer information

Senast uppdaterat

2019-12-03