Interface Layers of Niobium Nitride Thin Films
Paper in proceeding, 2019
Author
A. Lubenschenko
National Research University Moscow Power Engineering Institute
V. A. Iachuk
National Research University Moscow Power Engineering Institute
Sascha Krause
Chalmers, Space, Earth and Environment, Onsala Space Observatory
Alexey Pavolotskiy
Chalmers, Space, Earth and Environment, Onsala Space Observatory
D. A. Ivanov
National Research University Moscow Power Engineering Institute
Olga Lubenchenko
National Research University Moscow Power Engineering Institute
O. N. Pavlov
National Research University Moscow Power Engineering Institute
Journal of Physics: Conference Series
17426588 (ISSN) 17426596 (eISSN)
Vol. 1410 1 012124Saint Petersburg, Russia,
Subject Categories
Inorganic Chemistry
Materials Chemistry
Condensed Matter Physics
Infrastructure
Onsala Space Observatory
DOI
10.1088/1742-6596/1410/1/012124