Interface Layers of Niobium Nitride Thin Films
Paper in proceedings, 2019

Intermediate layers formed by thin NbN films are studied. A surface phase of NbN different from the bulk one under the oxide layer and a layer consisting of NbNx-SiOy between the film and the substrate are found.

Author

A. Lubenschenko

National Research University Moscow Power Engineering Institute

V. A. Iachuk

National Research University Moscow Power Engineering Institute

Sascha Krause

Chalmers, Space, Earth and Environment, Onsala Space Observatory, GARD Technology

Alexey Pavolotskiy

Chalmers, Space, Earth and Environment, Onsala Space Observatory, GARD Technology

D. A. Ivanov

National Research University Moscow Power Engineering Institute

Olga Lubenchenko

National Research University Moscow Power Engineering Institute

O. N. Pavlov

National Research University Moscow Power Engineering Institute

Journal of Physics: Conference Series

17426588 (ISSN) 17426596 (eISSN)

Vol. 1410 1 012124

6th International School and Conference on Optoelectronics, Photonics, Engineering and Nanostructures, SPbOPEN 2019
Saint Petersburg, Russia,

Subject Categories

Inorganic Chemistry

Materials Chemistry

Condensed Matter Physics

Infrastructure

Onsala Space Observatory

DOI

10.1088/1742-6596/1410/1/012124

More information

Latest update

2/12/2020