CMOS Compatible Fabrication of Mid Infrared Microspectrometers Based on an Array of Metamaterial Absorbers
Paper in proceeding, 2019
MEMS spectrometer
CMOS Compatible fabrication
Metamaterial midinfrared absorber
Mid-IR detector array
Author
Mohammadamir Ghaderi
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems
Reinoud F. Wolffenbuttel
Delft University of Technology
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Vol. June 2018 1580-1583 8808691
978-172812007-2 (ISBN)
Berlin, Germany,
Subject Categories
Accelerator Physics and Instrumentation
Embedded Systems
Other Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1109/TRANSDUCERS.2019.8808691