CMOS Compatible Fabrication of Mid Infrared Microspectrometers Based on an Array of Metamaterial Absorbers
Paper i proceeding, 2019

The design of a mid-infrared micro-spectrometer based on an array of differently tuned narrow-band metamaterial absorbers is presented. The spectral response is tailored by the design of the unit cell. Each spectral band is composed of a thermopile detector with a 300 ×180 μm2 Al-based metamaterial absorber fabricated in a CMOS compatible post-process. The challenges in the fabrication of the sub-μm features within the unit cell over a several mm2 absorber area by equipment that is part of the standard infrastructure of a MEMS facility is addressed. The design and fabrication method utilized here for the first time enables the CMOS fabrication of integrated large-area plasmonic components on thermal detectors.

MEMS spectrometer

CMOS Compatible fabrication

Metamaterial midinfrared absorber

Mid-IR detector array

Författare

Mohammadamir Ghaderi

Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial

Peter Enoksson

Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial

Reinoud F. Wolffenbuttel

TU Delft

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Vol. June 2018 1580-1583 8808691
978-172812007-2 (ISBN)

20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Berlin, Germany,

Ämneskategorier

Acceleratorfysik och instrumentering

Inbäddad systemteknik

Annan elektroteknik och elektronik

DOI

10.1109/TRANSDUCERS.2019.8808691

Mer information

Senast uppdaterat

2020-07-29