A new, sensitive diffractive optic angle meter
Paper in proceeding, 2002
A sensitive diffractive optic angle meter scheme, based on coherent imaging of two laterally shifted phase gratings onto a third, their periods matched, is presented and experimentally investigated. An angle less than 0.5 µrad was readily measured.
Author
Anders Magnusson
Department of Microelectronics
Kamyar Kazemi Moud
Department of Microelectronics
Sverker Hård
Department of Microelectronics
Diffractive Optics and Micro-Optics
paper DTuB2
Diffractive Optics and Micro-Optics 2002
Tucson, USA,
Tucson, USA,
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1364/DOMO.2002.DTuB2