A new, sensitive diffractive optic angle meter
Paper i proceeding, 2002

A sensitive diffractive optic angle meter scheme, based on coherent imaging of two laterally shifted phase gratings onto a third, their periods matched, is presented and experimentally investigated. An angle less than 0.5 µrad was readily measured.

Författare

Anders Magnusson

Institutionen för mikroelektronik

Kamyar Kazemi Moud

Institutionen för mikroelektronik

Sverker Hård

Institutionen för mikroelektronik

Diffractive Optics and Micro-Optics

paper DTuB2

Diffractive Optics and Micro-Optics 2002
Tucson, USA,

Ämneskategorier

Elektroteknik och elektronik

DOI

10.1364/DOMO.2002.DTuB2

Mer information

Senast uppdaterat

2021-01-07