Hot-plate emitter with distributed heating for high mid-IR output
Paper in proceeding, 2020

A suspended polySi heater is presented for use as a mid-IR light source in a microspectrometer based on a linearly variable optical filter (LVOF). Distributed electrical powering of a segmented structure with a specially designed suspension system is used for obtaining a temperature profile that is constant over the length of the element with a peak temperature significantly higher as compared to the conventional on-chip hot-wires. The integrated LVOF design results in an enhanced spectral emission and facilitates the use in the composition measurement of liquids and gases by absorption spectroscopy.

Author

Mohammadamir Ghaderi

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems

Yaonian Cui

Delft University of Technology

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems

Reinoud F. Wolffenbuttel

Delft University of Technology

Optics InfoBase Conference Papers

21622701 (eISSN)

JW2A.28
9781557528209 (ISBN)

Computational Optical Sensing and Imaging, COSI 2020 - Part of Imaging and Applied Optics Congress 2020
Virtual, Online, USA,

Subject Categories

Atom and Molecular Physics and Optics

Other Physics Topics

Other Electrical Engineering, Electronic Engineering, Information Engineering

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1/3/2024 9