Hot-plate emitter with distributed heating for high mid-IR output
Paper i proceeding, 2020

A suspended polySi heater is presented for use as a mid-IR light source in a microspectrometer based on a linearly variable optical filter (LVOF). Distributed electrical powering of a segmented structure with a specially designed suspension system is used for obtaining a temperature profile that is constant over the length of the element with a peak temperature significantly higher as compared to the conventional on-chip hot-wires. The integrated LVOF design results in an enhanced spectral emission and facilitates the use in the composition measurement of liquids and gases by absorption spectroscopy.


Mohammadamir Ghaderi

Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial

Yaonian Cui

TU Delft

Peter Enoksson

Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial

Reinoud F. Wolffenbuttel

TU Delft

Optics InfoBase Conference Papers

21622701 (eISSN)

9781557528209 (ISBN)

Computational Optical Sensing and Imaging, COSI 2020 - Part of Imaging and Applied Optics Congress 2020
Virtual, Online, USA,


Atom- och molekylfysik och optik

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