Thermally regenerable optical transparent MEMS windows for exhaust gas analysis
Paper in proceeding, 2020

Exhaust gas measurement in the harsh environment of the tailpipe by optical techniques is a highly robust technique, provided that optical access is maintained in the presence of soot. The design, fabrication, and testing of membranes in SiC-on-Si with integrated heaters to serve as a regenerable MEMS optical window into the tailpipe are presented. Membranes at slightly elevated temperatures are demonstrated to keep the surface transparent by thermophoresis, while surface regeneration is achieved at pulsed high temperatures, which allows long-term optical measurement in the exhaust.

Author

Mohammadamir Ghaderi

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Luke M. Middelburg

Delft University of Technology

David Bilby

Ford Motor Company

Jaco H. Visser

Ford Motor Company

Per Lundgren

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Reinoud F. Wolffenbuttel

Delft University of Technology

Optics InfoBase Conference Papers

JM2F.2
9781557528209 (ISBN)

Applied Industrial Spectroscopy, AIS 2020 - Part of Optical Sensors and Sensing Congress 2020
Virtual, Online, USA,

Subject Categories

Atom and Molecular Physics and Optics

Other Physics Topics

Bioengineering Equipment

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Latest update

11/24/2021