Thermally regenerable optical transparent MEMS windows for exhaust gas analysis
Paper in proceeding, 2020
Author
Mohammadamir Ghaderi
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems
Luke M. Middelburg
Delft University of Technology
David Bilby
Ford Motor Company
Jaco H. Visser
Ford Motor Company
Per Lundgren
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems
Reinoud F. Wolffenbuttel
Delft University of Technology
Optics InfoBase Conference Papers
JM2F.2
9781557528209 (ISBN)
Virtual, Online, USA,
Subject Categories
Atom and Molecular Physics and Optics
Other Physics Topics
Bioengineering Equipment