Thermally regenerable optical transparent MEMS windows for exhaust gas analysis
Paper i proceeding, 2020

Exhaust gas measurement in the harsh environment of the tailpipe by optical techniques is a highly robust technique, provided that optical access is maintained in the presence of soot. The design, fabrication, and testing of membranes in SiC-on-Si with integrated heaters to serve as a regenerable MEMS optical window into the tailpipe are presented. Membranes at slightly elevated temperatures are demonstrated to keep the surface transparent by thermophoresis, while surface regeneration is achieved at pulsed high temperatures, which allows long-term optical measurement in the exhaust.


Mohammadamir Ghaderi

Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial

Luke M. Middelburg

TU Delft

David Bilby

Ford Motor Company

Jaco H. Visser

Ford Motor Company

Per Lundgren

Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial

Peter Enoksson

Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial

Reinoud F. Wolffenbuttel

TU Delft

Optics InfoBase Conference Papers

9781557528209 (ISBN)

Applied Industrial Spectroscopy, AIS 2020 - Part of Optical Sensors and Sensing Congress 2020
Virtual, Online, USA,


Atom- och molekylfysik och optik

Annan fysik

Bioteknisk apparatteknik

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